EPYAOI-A200 AOI Automation equipment for epitaxy

EPYAOI-A200 AOI Automation equipment for epitaxy

從自動化關鍵零組件的單軸模組,傳動元件,運動控制卡,軟體研發,到自動化設備應用規劃及研發客制,如產業機器人,機器手臂,PCB切割機,SMT制程設備,LED/半導體制程設備,光通訊設備,自動光學檢測AOI設備和椿科技提供一貫且完整的解決方案。

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PCB Depaneling Systems: +886-3-322-3788
Email:  info@aurotek.com

Optical Communication Systems: +886-3-322-3788 
Email:  info@aurotek.com

AOI Automation equipment for epitaxy

EPYAOI-A200
磊晶應用自動光學檢測設備 磊晶應用自動光學檢測設備
磊晶應用自動光學檢測設備
磊晶應用自動光學檢測設備
Product
Specification
Product

Aurotek provide all the AOI equipment for LED manufacturing processes before exitaxy. Base on the strong experience of AOI equipment research and development, Aurotek launch the EpyAOI-100, which is now the first and best one in LED AOI industry, specialized to detect defects on the wafer after epitaxy process.

Base on the self-developed image processing technology and simulated yield rate calculating software, EpyAOI-A100 could efficiently inspect and analyze defects on wafer after expitaxy. Moreover, Aurotek has the full co-developed experience with epitaxy partners to optimize the AOI equipment, the epi-defects inspecting and analyzing. Hence, the AOI equipments provided by Aurotek are obviously matched the high demand from LED industry.

Specification
Project
Specification
Line Scan 镜头 (低倍)
16K CCD Camera + 3.3x 镜头
解析度 1.5 x 1.5 um²
同轴光源 (白光) 及亮度控制系统
影片撷取卡
线性扫描
复检显微镜 (高倍)
5M CCD Camera
同轴光源 (白光) 及亮度控制系统
20 倍显微物镜 (自动对焦)
自动寻边模组
视野范围 4, 6 共用
Autofocus 自动对焦
量测范围: ±1 mm
静态变数: 0.25 um
光点直径: Ø40 um
雷刻码辨识系统
(选配) OCR 雷刻辨识器
XYZ 行程
移动距离: X: 300 mm, Y: 200 mm, Z: 10 mm
各轴精度: ±1 um
各轴重复精度: ±2 um
机械手臂
双臂左右平行式手臂
旋转角度约 340°
Cassette Load Port
各站自动侦测 4, 6 吋 Cassette
分规可自行设定
真空治具
最大可摆放 6 吋 Wafer
运动控制器
8 轴运动控制卡
条码
提供 USB 介面,使用者可连接条码读取头