Nano-Patterned Sapphire Substrate,  NPSS
The periodic sapphire nano-structure is fabricated by etching technology, carriers for gallium nitride glowing and world wide material for high brightness blue light emitting diode.
Advantages of nano patterned sapphire substrate (NPSS):
- Enhance the light extraction of LED.
- Improve the electrical performance of LED.
Advantages of NPSS than PSS：
- High uniformity of sub-micro structure patterned by nano-imprinting.
- Increase throughput of dry etching and epitaxy equipment.