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Nano-Patterned Sapphire Substrate,  NPSS
The periodic sapphire nano-structure is fabricated by etching technology, carriers for gallium nitride glowing and world wide material for high brightness blue light emitting diode.
Advantages of nano patterned sapphire substrate (NPSS):
- Enhance the light extraction of LED.
- Improve the electrical performance of LED.
Advantages of NPSS than PSS:
- High uniformity of sub-micro structure patterned by nano-imprinting.
- Increase throughput of dry etching and epitaxy equipment.
Orientation Flat : A-plane (11-20)
Thickness : 430 +/- 25 mm
Height: 600nm
Bottom Diameter: 900nm
Arrangement : Trigonal