Dry etching OEM

Dry etching OEM

從自動化關鍵零組件的單軸模組,傳動元件,運動控制卡,軟體研發,到自動化設備應用規劃及研發客制,如產業機器人,機器手臂,PCB切割機,SMT制程設備,LED/半導體制程設備,光通訊設備,自動光學檢測AOI設備和椿科技提供一貫且完整的解決方案。

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Dry etching OEM

ICP
圖案化乾蝕刻代工 OEM
圖案化乾蝕刻代工 OEM
Product
Product

Dry Etching OEM service adopts high-performance ICP etcher from Panasonic, Japan, with high manufacturing uniformity, stability, and etching rate, which is one of the best etchers to create variable profiles on substrates.

Panasonic E620

Quantity: 1

Working capacity: 7 pieces of 2 inch sapphire substrates at the same time.

Gas source: BCl3 Cl2 CF4 Ar N2 O2 He