Micro-Patterned Sapphire Substrate,MPSS

Micro-Patterned Sapphire Substrate,MPSS

從自動化關鍵零組件的單軸模組,傳動元件,運動控制卡,軟體研發,到自動化設備應用規劃及研發客制,如產業機器人,機器手臂,PCB切割機,SMT制程設備,LED/半導體制程設備,光通訊設備,自動光學檢測AOI設備和椿科技提供一貫且完整的解決方案。

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Micro-Patterned Sapphire Substrate,MPSS

Micro-Patterned Sapphire
微米圖案化藍寶石基板
微米圖案化藍寶石基板
Product
Specification
Product

The periodic sapphire micro-structure is fabricated by etching technology, carriers for gallium nitride glowing and world wide material for high brightness light emitting diode.

 

Advantages of micro patterned sapphire substrate (MPSS):

  • Enhance the light extraction of LED.
  • Improve the electrical performance of LED.

 

Advantages of imprinting lithography than typical lithography:

  • Large allowable tolerance for BOW, WRAP, TTV and LTV of substrate.
Specification
Project
Specification
Orientation
Surface Orientation : C-plain (0001)
Orientation Flat : A-plane (11-20)
Wafer Size
Diameter : 50.8 +/- 0.2 mm
Thickness : 430 +/- 25 mm
Front Surface(Pattern Size)
Pitch: 3000nm
Height: 1700nm
Bottom Diameter: 2800nm
Arrangement : Trigonal
Back Surface
Finishing : Fine Ground