Micro-Patterned Sapphire Substrate,MPSS
The periodic sapphire micro-structure is fabricated by etching technology, carriers for gallium nitride glowing and world wide material for high brightness light emitting diode.
Advantages of micro patterned sapphire substrate (MPSS)：
- Enhance the light extraction of LED.
- Improve the electrical performance of LED.
Advantages of imprinting lithography than typical lithography：
- Large allowable tolerance for BOW, WRAP, TTV and LTV of substrate.