Dry etching OEM

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Dry Etching OEM service adopts high-performance ICP etcher from Panasonic, Japan, with high manufacturing uniformity, stability, and etching rate, which is one of the best etchers to create variable profiles on substrates.

Panasonic E620
Quantity: 1
Working capacity: 7 pieces of 2 inch sapphire substrates at the same time.
Gas source: BCl3 Cl2 CF4 Ar N2 O2 He